Excimer Lasers

Field-proven compact UV light sources, high-power excimer lasers, and complete beam delivery systems.

Coherent, founded in 1966, is a leading global provider of solutions based on laser, with a diversified portfolio of laser sources for a wide range of commercial and scientific applications.

Coherent has established an optimized, field-proven excimer laser portfolio at all performance levels from compact ultraviolet (UV) light sources and high-power excimer lasers to complete beam delivery systems. Excimer lasers are available in the following UV laser wavelengths: 157 nm, 193 nm, 248 nm, 308 nm and 351 nm. Browse our catalog of Excimer laser products and applications in the tabs below.

UV Processing Solutions
Solutions for Scientific, Medical, and Industrial applications.
ExciStar XS
Small size and high reliability, stand alone or OEM, UV laser.
System for excimer laser crystallization annealing applications.
UV Optical Components
Making the most of a UV laser beam.

The COMPex deliver superior results in demanding applications.
Compact excimer laser now up to 2000 Hz repetition rate.
The LAMBDA SX lasers are perfectly suited for high throughput industrial applications.
Economical industrial excimer laser providing 150 Watts of UV power.

LPXpro lasers offer a broad range of pulse energies from 120 mJ up to 1.1 Joule.
The GeoLasHD makes the most out of today’s advanced mass spectrometers.
UV System for Laser Lift-Off Applications.
VarioLas Family
Affordable tools for high quality UV microprocessing.

Multiple beam, very high power excimer lasers
best suited for Excimer Laser Annealing.