STACIS® Active Piezoelectric Vibration Cancellation
Primarily designed to isolate precision microlithography, metrology, and inspection equipment in advanced semiconductor factories, STACIS is now the industry standard solution for the most sensitive instruments in noisy environments.
TMC designs and manufactures advanced building floor vibration isolation systems for nanotechnology. TMC isolators support ultra precision measurements, instruments, and manufacturing.
STACIS® III is the most advanced active vibration cancellation system. Employing advanced inertial vibration sensors, sophisticated control algorithms, and state-of-the-art piezoelectric actuators, STACIS cancels vibration in real time by continuously measuring floor activity, then expanding and contracting piezoelectric actuators to filter out floor motion.
TMC’s Quiet Island® is an innovative solution that replaces a section of the raised floor area with a “Quiet Island” anchored to the sub-floor below. The Quiet Island consists of a special platform combined with a dedicated support structure, the nature of which depends upon the application.
TMC's 65 Series Floor Platfomr combine the Stainless Steel Platforms with a unique “lifthood” design, our isolators “cradle” the platform allowing the tool to be lifted a minimal distance above the floor. And, because the isolators are not integrated into the platform, the platform may be custom designed to match the tool footprint or any desired shape.